Research Output
A comparative study of integrated ferroelectric polymer pyroelectric sensors.
  This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a i μm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Peak responsivities of 4.5 V/W at 200 Hz and 3 V/W at 1kHz have been achieved for the pyroelectric sensors based on PVDF AND VDF/TrFE copolymer, respectively. Despite the responsivity of PVDF being slightly higher than that of the VDF/TrFE copolymer, the choice of which polymer to use will depend on the application and the preferred processing route

  • Type:


  • Date:

    31 March 1998

  • Publication Status:


  • Publisher

    Taylor and Francis

  • DOI:


  • ISSN:


  • Library of Congress:

    TK Electrical engineering. Electronics Nuclear engineering

  • Dewey Decimal Classification:

    621.3 Electrical & electronic engineering


Setiadi, D., Binnie, D., Armitage, A., Benjamin, K. & Weller, H. (1998). A comparative study of integrated ferroelectric polymer pyroelectric sensors. Integrated Ferroelectrics. 19, 33-47. doi:10.1080/10584589808012694. ISSN 1058-4587



Pyroelectric sensor; PVDF; VDF/TrFE copolymer;

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